MF039800 - SEMI MF398 - Test Method for Majority Carrier Concentration in Semiconductors by Measurement of Wavenumber or Wavelength of the Plasma Resonance Minimum Revision:SEMI MF398-92 (Withdrawn 0307) - Withdrawn - Historical
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Description
MF039800 - SEMI MF398 - Test Method for Majority Carrier Concentration in Semiconductors by Measurement of Wavenumber or Wavelength of the Plasma Resonance Minimum Revision:SEMI MF398-92 (Withdrawn 0307) - Withdrawn - HistoricalThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published by ASTM International as ASTM F398 74T; previously published as SEMI MF398 92 (Reapproved 2002) NOTICE: This document was balloted and approved for withdrawal in 2007. This test method covers
previously published June 1999
thus providing information on the ability of the plastic package material to dissipate heat
communication protocols to transfer the data are beyond the scope of this Document
SEMI M20-0215 (Reapproved 0421)
This Specification is for general usage and outlines the basic requirements for open cassettes for 150 mm sapphire wafer sizes
1-0318 (Reapproved 0324)
This Standard was technically approved by the global Micropatterning Committee
specifications and validated analytical procedures
The scope of this Document covers a tier of PDMAT
SEMI E6-0914 (technical revision)
This Specification covers virgin test wafers in all standard wafer diameters from 2 inch to 300 mm
This Standard specifies the concepts
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