MF207400 - SEMI MF2074 - Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers Revision:SEMI MF2074-0912 (Reapproved 0718) - Superseded

MF207400 - SEMI MF2074 - Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers Revision:SEMI MF2074-0912 (Reapproved 0718) - SupersededThe diameter of semiconductor wafers is an important parameter in microelectronic fabrication. Wafer diameters must conform to the limits specified in SEMI M1; or other agreed upon limits, or product that is otherwise suitable may not fit correctly in process equipment. Cam follower edge rounding usually results in wafers that are circular. However, wafers ground with edge follower edge rounding equipment may be elliptically shaped. Measurements made

These attributes include electrical

特定のラフネス測定の識別に関しての参考試験方法

SEMI C28-0704 (technical revision)

SEMI MF1535-1015 (Reapproved 1121)

SEMI E80-0299 (Reapproved 1104)

SEMI E64 — Specification for 300 mm Cart to SEMI E15

It expands the GEM standard requirements and capabilities in the areas of state models (TSSC

The results obtained may differ significantly from those obtained with the specified oxidation cycles

SEMI MF951 — Test Method for Determination of Radial Interstitial Oxygen Variation in Silicon Wafers

SEMI C38 — Guideline for Phosphorus Oxychloride

and structural properties of silicon annealed wafers for 180 nm

Aqueous salt solutions