F08000 - SEMI F80 - Test Method for Determination of Gas Change/Purge Efficiency of Gas Delivery System StdTpc-Physical Interfaces SEMI D9-94 (first published)

SEMI D9-94 (first published)

critical pitting temperature) in addition to a qualitative (i

which is biologically and ecologically very hazardous

本スタンダードでは，FPDカラーフィルタに使用される高抵抗樹脂ブラックマトリクス（BM）の指定された特性を測定するための実施要領を確立するものとする。これらの方法は，製造，品質管理，および開発業務に応用することができる。

F08000 - SEMI F80 - Test Method for Determination of Gas Change/Purge Efficiency of Gas Delivery System StdTpc-Physical Interfaces SEMI D9-94 (first published)This Document is a guide to a test method to determine gas change purge efficiency of gas delivery system. It covers both conventional metal face sealing and surface mount gas delivery systems. This Test Method applies to all type of high purity gas delivery systems used in semiconductor manufacturing facilities and comparable research and development areas. Referenced SEMI Standards None.