E03700 - SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services StdVol-Gases 背景および動機

背景および動機

org in September 2015

Repeated use of this Test Method on different areas of the specimen permits mapping of the surface TIS and computed rms microroughness

As gate dielectric thickness approaches 1 nm

E03700 - SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services StdVol-Gases 背景および動機High Speed SECS Message Services (HSMS) provides a means for independent manufacturers to produce implementations which can be connected and interoperate without requiring specific knowledge of one another. HSMS is intended as an alternative to SEMI E4 (SECS I) for applications where higher speed communication is needed or when a simple point to point topology is insufficient. SEMI E4 (SECS I) can still be used in applications where these and other