E08000 - SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) Revision:SEMI E80-0299 (Reapproved 0915) - Superseded 製造装置上のトランスファポイント（受け渡しポジション）のオブジェクトへのサービスコマンド

製造装置上のトランスファポイント（受け渡しポジション）のオブジェクトへのサービスコマンド

This Guide defines the items/parameters to acquire silicon wafers to be used as carrier wafers in a temporary bond/debond (TBDB) application

Ionic impurities (see SEMI G75

The order of the data items is not restricted in this Document

E08000 - SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) Revision:SEMI E80-0299 (Reapproved 0915) - Superseded 製造装置上のトランスファポイント（受け渡しポジション）のオブジェクトへのサービスコマンドThe purpose of this Test Method is to provide a standardized method for quantifying the effect of mounting attitude on a mass flow controller (MFC). This Standard provides a common basis for communication between manufacturers and users regarding testing and describing MFC mounting effects. This Standard describes a method to determine the effect of attitude (mounting position) of a MFC on flow span and zero. The intent of this Standard is not to