MF011000 - SEMI MF110 - Test Method for Thickness of Epitaxial or Diffused Layers in Silicon by the Angle Lapping and Staining Technique Revision:SEMI MF110-1107 (Reapproved 0718) - Superseded
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Description
MF011000 - SEMI MF110 - Test Method for Thickness of Epitaxial or Diffused Layers in Silicon by the Angle Lapping and Staining Technique Revision:SEMI MF110-1107 (Reapproved 0718) - SupersededThis Test Method covers a procedure suitable for interlaboratory comparisons of layer thickness. This Test Method is applicable for layers of any resistivity so long as the layer differs from the silicon substrate under it either in conductivity type or by at least one order of magnitude in resistivity. The method described is destructive in nature but is more widely applicable than the alternative infrared method, SEMI MF95. For layers with
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2 This standard specifies procedures to measure extractable metal impurities from perfluoroalkoxy alkane (PFA) and other fluorinated materials and from high purity liquid distribution components
This Standard describes a specific device structure and behavior of a generic equipment networked sensor
FOBIT or open cassette using automated methods
SEMI D78-0224 (technical revision)
which is used to rank the pitting corrosion resistance of wetted surfaces of tubing or test coupons of representative finished surfaces intended for use in corrosive gas systems
but not limited to
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This Standard provides guidance for development and delivery of training supplied without using dedicated training equipment
SEMI M56-1018 (Reapproved 1023)
Originally published December 1996
The actual size may be further restricted by an application document
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