P04300 - SEMI P43 - Photomask Qualification Terminology StdTpc-CIM Framework 3-0600 (technical revision)

3-0600 (technical revision)

This Guide is intended for use in both establishing new Specifications within SEMI as well as verification of performance to SEMI Specifications

SEMI E12-1213 (technical revision)

• Oxygen (O2)

P04300 - SEMI P43 - Photomask Qualification Terminology StdTpc-CIM Framework 3-0600 (technical revision)This Standard was technically approved by the global Micropatterning Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2011. Available at www. semiviews. org and www. semi. org in June 2011; originally published March 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines