M04300 - SEMI M43 - Guide for Reporting Wafer Nanotopography Revision:SEMI M43-0418 (Reapproved 0923) - Current the concern is simply with

the concern is simply with controlling the process so that such impurities are not present

SEMI E116-0706 (technical revision)

This Standard covers only load ports for reticle SMIF pods (RSPs) as specified in SEMI E100

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M04300 - SEMI M43 - Guide for Reporting Wafer Nanotopography Revision:SEMI M43-0418 (Reapproved 0923) - Current the concern is simply withThis Guide provides a framework for reporting of nanotopography surface features on silicon wafers. This Guide addresses reporting the characterization of nanotopography surface features found on wafer surfaces. Nanotopography is the non planar deviation of the whole front wafer surface within a spatial wavelength range of approximately 0. 2 to 20 mm and within the fixed quality area (FQA). Typical examples include dips, bumps or waves on the wafer