E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard StdPbc-0818 Operating problems and additional product

Operating problems and additional product defects due to static charge can have a negative impact on the cost of ownership (COO) of semiconductor manufacturing equipment (refer to SEMI E35)

000 defects per cm2

This standard was technically approved by the global Flat Panel Display – Factory Automation Committee

Similar processes are defined in ASTM E82

E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard StdPbc-0818 Operating problems and additional productThis standard was technically approved by the global Physical Interfaces & Carriers Committee and is the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition reapproved by the North American Regional Standards Committee on August 16 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1992; last published June 1999. NOTICE: This document was