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M03400 - SEMI M34 - SIMOXウェーハを規定するための指針 Revision:SEMI M34-0299 - Superseded SEMI F48-0600 (technical revision)

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SEMI F48-0600 (technical revision)

Part 3 of the Silicon Wafer Specification Format for Order Entry

背接触硅基太阳能光伏电池和组件的设备。

orgで,そして2006年7月にCD-ROMで入手可能となる。初版は1993年発行,前版は2000年10月発行。

M03400 - SEMI M34 - SIMOXウェーハを規定するための指針 Revision:SEMI M34-0299 - Superseded SEMI F48-0600 (technical revision)0. 5 mSIMOXSIMOX SOI Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M22 Specification for Dielectrically Isolated (DI) Wafers

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