E02200 - SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume StdTpc-Terminology The scope of this Specification

The scope of this Specification is limited to communications associated with the material handoff operations between the active equipment (e

To help the communication between component/material/IC and panel manufactures

such as wafer carriers and wands

SEMI D63-0818 (technical revision)

E02200 - SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume StdTpc-Terminology The scope of this SpecificationNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to provide sufficient detail to allow the transport module end effector to move wafers to and from process and cassette modules in a cluster tool without mechanical interference. This