E05412 - SEMI E54.12 - Specification for Sensor/Actuator Network Communications for CC-Link StdPbc-1220 Report contains 10 types of

Report contains 10 types of wafer fab materials and 7 types of packaging materials

Measurement Data Summary Technique and Data Usage for Test Report

front-opening box for interfactory transport (FOBIT) or open cassette inside an IC manufacturing facility

本スタンダードの目的は，450　mmのクラスタツールからなる搬送モジュールとプロセスモジュール間の必要最小レベルの物理接続性を保証することである。両方のモジュールが本スタンダードの要件を満たしているかぎり，プロセスモジュールは最小限の設計変更で任意のクラスタツールの搬送モジュールに接続できるようになることが期待される。

E05412 - SEMI E54.12 - Specification for Sensor/Actuator Network Communications for CC-Link StdPbc-1220 Report contains 10 types ofNOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. This Specification is part of the SEMI sensor actuator network (SAN) suite of Standards and defines a specific communications protocol based on the CC Link standard. This network communication standard (NCS) taken together with the SEMI SAN Standard suite and the CC Link standard completely and unambiguously defines an open standard