TEL Tokyo Electron 3M81-027681-14 MMI Interlock Controller PCB Trias Surplus and the arm controller board

and the arm controller board

Inventory # A-13004

Inventory # G6844

Model No: AC6-IHHCB-00

TEL Tokyo Electron 3M81-027681-14 MMI Interlock Controller PCB Trias Surplus and the arm controller boardTEL Tokyo Electron 3M81 027681 14 MMI Interlock Controller PCB Assembly Trias Part No: 3M80 001256 14 Model No: INTERLOCK MMI CTRL 3M81 027681 14 Daughterboard Part No: 3M80 001285 13, INTERLOCK CONT1 Removed from a TEL Tokyo Electron Trias CF,CN, ,CO Radical Process Reactor System This is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Working, 90 Day Warranty