E11500 - SEMI E115 - Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems StdTpc-Mass Flow Controllers NOTICE: This Document was completely

NOTICE: This Document was completely rewritten in 2016

particularly in components and tubing welded and exposed to corrosive gases and moisture

Operating Situations — Moisture contribution from a gas delivery component may be the result of improper design and construction

SEMI E111-1104 (technical revision)

E11500 - SEMI E115 - Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems StdTpc-Mass Flow Controllers NOTICE: This Document was completelyThe purpose of this Standard is to define a test method used to determine the load impedance and efficiency of matching networks used in RF power delivery systems for semiconductor processing equipment. This Standard specifies the testing procedures and test equipment required for determining the load impedance and power efficiency of a matching network based on the positions of the tuning elements in the matching network. The primary focus for this